In this work researches of structural and electrophysical properties of ferroelectric films of lead zirconate titanate (PZT) which afterwards is planned to apply in hybrid sensor systems are done. Values of capacities of the received samples are in the range from 200 to 1100 pF, the range of thickness of the received films is 300-1000 nanometers. X-ray analysis showed direct dependence of the quantitative maintenance of crystalline PZT in film structure from partial pressure of oxygen in the camera. By results of research the range of polarization of samples are in the range 0,06 – 2,2 µC/cm2, and values of calculated piezoelectric modules are in the range 0,04*10-12 – 13,3*10-12 C/N.
Keywords: sensors, segnetoelektric films, touch systems, piezoelectric modules.