Sensitive element of CO sensor was created by pulsed laser deposition and it was integrated in device of surface acoustic waves (SAW). Photoluminescence was used to control of oxygen-related defects of ZnO nanorod arrays. It is shown that the deficiency of oxygen in zinc oxide nanorods can be increased by change in temperature synthesis of nanorods of 850 to 915 ° C with a high argon pressure, and control of the deficiency of oxygen by increasing the ratio of the intensity of radiation in the visible region of the luminescence intensity in the ultraviolet region of the spectrum can help to increase the sensitivity of CO.

Keywords: ZnO nanorods, photoluminescence, CO sensor

Structure of  surface acoustic waves(SAW) of CO sensor was developed. SAW sensor include transceiving IDT and catoptric IDT, which is loaded on the impedance of ZnO nanorods. Peak of reflection SAW from IDT clearly observed as result Fourier transformation of time function of pulsed response. IDT loaded on resistance paralleled ZnO nanorods, which depends on the concentration of CO.

Keywords: ZnO nanorods, device on SAW, CO sensor

In the present work we have carried out studies of the processes of growth of zinc oxide nanorods by hydrothermal method on silicon substrates. As sublayer catalyst used growth caused by laser deposition of zinc oxide, various thicknesses. Studied selective growth of nanorods on the microstructure of thin-film sub-layers of zinc oxide obtained by laser deposition. The optimal conditions for the synthesis of: the concentration of Zn (NO3) 2 - 0.4 mol / l, hexamethylenetetramine - 0.4 mol / l, the concentration of NH3 · H2O - 0,01 mol / L -0.01, process time 4:00, the process temperature is 80 ° C. Sublayer thickness of zinc oxide, as shown by experiment, the growth of the rods has no noticeable effect. Oriented arrays of nanorods were obtained up to 500 nm and a diameter of 60-150 nm.
Keywords: zinc oxide nanorods and micro-oriented arrays of nanorods, hydrothermal synthesis method, selective growth, thin film underlayer.

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