"This article is devoted to the development of the method for modeling elements of microsystems technology(MST) of membrane type. In this paper perforated membranes are considered and the impact of perforation on the mechanical properties of the membranes is examined. In numerical simulations of the elements it is proposed to use the equivalent mechanical parameters of perforated membranes obtained at the initial stage of the simulation. This will allow to obtain find the optimal parameters of perforation, reduce the time and resource modeling of MST elements. To test the technique numerical experiments were conducted for the two square membranes with sides 1.5 and 3 mm fixed on the contour of the same thickness. We studied the influence of the size of the perforation on the equivalent Young's modulus of the perforated membrane. "

Keywords: microsystems technology, numerical modeling, perforated membrane

  The integrated sensor LR-type on the basis of carbon nanotube is described. Are offered a method of processing of the sensor signals. Results of modelling are represented.

Keywords: Еlement base, microelectromechanical system, design, sensor, gyroscope, accelerometer.

The received results of modelling of a micromechanical sensor of angular speeds and linear accelerations are considered. 

Keywords: microsystm technology, element base, modeling, sensor, gyroscope, accelerometer

A design of the actuator, consisting of a thin layers of silicon dioxide and aluminum is proposed. There are calculations made of the response speed and heat dissipation of the actuator. By making the best selection of layer thicknesses and optimization stages of technological process, in particular the deep selective etching of silicon, the best performance on the angle of inclination of the actuator and the speed of the device could be achived. The greater the difference between the initial temperature and the heating temperature, the stronger the beam of the actuator is lowered to the plane of the silicon plate, and, therefore, less angle of elevation above the surface of the silicon plate. It is thus possible to control the angle of the beam by selecting the appropriate heater and voltage, providing the desired temperature. The design of the micromirror device based on the proposed actuator is provided. The developed design is based on the actuator and allows for controling the tilt of the mirror in a wide range.

Keywords: silicon, termoactuator, micromechanical systems, bimorph structure, micromirrors